JPH0543097Y2 - - Google Patents

Info

Publication number
JPH0543097Y2
JPH0543097Y2 JP19148987U JP19148987U JPH0543097Y2 JP H0543097 Y2 JPH0543097 Y2 JP H0543097Y2 JP 19148987 U JP19148987 U JP 19148987U JP 19148987 U JP19148987 U JP 19148987U JP H0543097 Y2 JPH0543097 Y2 JP H0543097Y2
Authority
JP
Japan
Prior art keywords
dielectric
reaction vessel
line
plasma
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19148987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0194461U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19148987U priority Critical patent/JPH0543097Y2/ja
Publication of JPH0194461U publication Critical patent/JPH0194461U/ja
Application granted granted Critical
Publication of JPH0543097Y2 publication Critical patent/JPH0543097Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19148987U 1987-12-16 1987-12-16 Expired - Lifetime JPH0543097Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19148987U JPH0543097Y2 (en]) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19148987U JPH0543097Y2 (en]) 1987-12-16 1987-12-16

Publications (2)

Publication Number Publication Date
JPH0194461U JPH0194461U (en]) 1989-06-21
JPH0543097Y2 true JPH0543097Y2 (en]) 1993-10-29

Family

ID=31482396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19148987U Expired - Lifetime JPH0543097Y2 (en]) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0543097Y2 (en])

Also Published As

Publication number Publication date
JPH0194461U (en]) 1989-06-21

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